The nano-bowl shaped structure and gold nanoparticle array were successfully fabricated on the YSZ substrate and examined to improve the sensitivity of mixed potential type NH₃gas sensor. The nano-bowl shaped structure was constructed by solution-dipping template (polystyrene spheres) strategy and gold nanoparticle inlaid in the nanostructure was fabricated by vacuum evaporation plating technology. The present study mainly explored the influence of gold layer's thickness on the nanostructure. The perfect ordered gold nanoparticle array inlaid in nano-bowl shaped structure was obtained when the evaporated gold film thickness was about 50nm. The mixed potential type gas sensor which based on processed YSZ substrate displayed the improved sensitivity and selectivity to NH₃at elevated temperature. All the enhanced sensing properties might due to the enlarged three phase boundary (TPB) and inlaid gold nanoparticle array.